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ETRI Technology

Subminiature Gas Sensor Technology for Managing Indoor Air Quality

Subminiature Gas Sensor Technology for Managing Indoor Air Quality


  • Senses gas by a change of electrical resistance occurred by electron swap between sensing material and gas, and activates reaction by partially heating with heater.
  • Sensing material uses a method evaporating large area like screen printing, inkjet printing, chemical vapor deposition, sputtering, and etc. 
  • Especially making high-thermal efficiency and high-stiffness designed micro heater with CMOS-MEMS process and applying it to gas sensor, enables materialization of subminiature low-power-consumption sensor.





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